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发明名称
PROBE SCANNING MICROSCOPE
摘要
申请公布号
JPH05322552(A)
申请公布日期
1993.12.07
申请号
JP19920124544
申请日期
1992.05.18
申请人
YOKOGAWA ELECTRIC CORP
发明人
NANKO TOMOAKI;OYA AKIRA
分类号
G01B21/30;G01N13/00;G01Q60/24;G01Q60/28;H01J37/28;(IPC1-7):G01B21/30
主分类号
G01B21/30
代理机构
代理人
主权项
地址
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