| 摘要 |
PURPOSE:To obtain a clean surface without adhesion of particles by forming a polymer coating on a substrate having a smooth surface and separating the polymer coating. CONSTITUTION:A polymer coating is formed on a substrate and then the particles adhering to the coating are removed. The substrate capable of being cleanzed is a substrate having a smooth surface without such surface irregularity to obstruct the separation of the coating, for example, a silicon wafer, mask blanks, a substrate with a metal thin film formed on the surface, a metal plate, a glass plate, a plastic plate and the like. And a polymer coating is formed by using a polymer solution, and for a polymer in the polymer solution, for example, a pellicle film polymer of polyvinylpropional, nitrocellulose and the like, a bonding agent polymer of polyvinyl acetate, polyvinyl chloride and the like, a copolymer of tetrachloroethylene-vinylidenefluoride and the like are available. |
