| 摘要 |
PURPOSE:To measure with high accuracy the shape, the dimension and the positional information of circuit patterns of a mask by providing a temperature measuring means for measuring the temperature of a mask and a means for storing resultant measurements in the part of the mask. CONSTITUTION:A temperature sensor 2 measures the temperature of a pattern region MP in which the circuit patterns of a mask M is formed and has a temperature measuring part 1a and an electrode 2b. The electrode 2b transmits a temperature signal from the temperature measuring part 2a through a transmission lead wire 7 to a temperature measuring controller 1. Then, a constant current circuit 112 allows a current to flow into a resistance thermometer 2, and a voltage generated between both terminals of the resistance thermometer 2 is detected by a preamplifier 111, thereby making it feasible to detect the resistance variations of the thermometer 2, that is, the temperature variations of the resistance thermometer 2. The output of the preamplifier 111 is connected with an A/D convertor 106 to be converted into a digital form and then stored into RAM 104a at constant time intervals. |
