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发明名称
SPUTTERING SYSTEM
摘要
申请公布号
JPH05320889(A)
申请公布日期
1993.12.07
申请号
JP19920127697
申请日期
1992.05.20
申请人
FUJITSU LTD;FUJITSU TOHOKU ELECTRON:KK
发明人
SATO YOSHIHIRO
分类号
C23C14/34;H01L21/203;H01L21/31;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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