| 摘要 |
PURPOSE:To obtain an acceleration sensor, which can enhance the shock resistance of an acceleration detecting element even if low-rigidity member is used and can achieve the compact configuration of the entire shape. CONSTITUTION:In this acceleration sensor, a hybrid IC substrate 1, on the surface of which electrodes 5 and 6 for taking out signals are formed in parallel, and an acceleration detecting element 2, which is provided between the electrodes 5 and 6, are provided. The detecting element 2 is arranged in the direction, where the polarizing directions A1 and A2 are in parallel with the surface of the hybrid IC substrate 1. Piezoelectric elements 8 and 9, where the polarizing directions A1 and A2 are oriented into the reverse direction to each other, are provided. Surfaces 8a and 9a of the piezoelectric elements 8 and 9, which are in parallel with the respective polarizing directions A2 and A2, are conducted and connected through a weight 10. Or surfaces 8c and 9c, which are perpendicular to the polarizing directions A1 and A2, are conducted and connected in close contact. Meanwhile, other surfaces 8b and 9b or 8d and 9d are individually conducted and connected to the electrodes 5 and 6. |
