| 摘要 |
PURPOSE:To obtain the device which can stably develop various kinds of optical master disks with good accuracy. CONSTITUTION:The device for irradiating the pattern surface of the optical master disk 1 with a laser beam, detecting the intensities of zero order diffracted light and first order diffracted light, comparing the intensities and controlling the progression of development is provided with a first order diffracted light detecting means 62 movably on the virtual arc to be the same in the distance of the first order diffracted light from the pattern surface of the optical master disk 1 according to the diffraction angle of the first order diffracted light independently from a zero order diffracted light detecting means 61. A correcting means 71 which can correct the intensity of the diffracted light in compliance with the groove width of latent image patterns or the width of signal bits is added to a development control section 8. |
