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发明名称
IC INSPECTION DEVICE
摘要
申请公布号
JPH05322971(A)
申请公布日期
1993.12.07
申请号
JP19920126059
申请日期
1992.05.19
申请人
HITACHI LTD;HITACHI SHIMIZU ENG KK
发明人
SUGIYAMA SHIGEAKI;UMEHARA KATSUTOSHI;MASUDA SHINTARO;OGAWA TAKEO
分类号
G01R31/26;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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