FORMATION OF VAPOR-DEPOSITED THIN FILM,申请号JP19920127495-传众专利搜索

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发明名称	FORMATION OF VAPOR-DEPOSITED THIN FILM
摘要
申请公布号	JPH05320882(A)	申请公布日期	1993.12.07
申请号	JP19920127495	申请日期	1992.05.20
申请人	MITSUBISHI KASEI CORP	发明人	WATABE YUKIO
分类号	C01B13/14;C01G1/00;C23C14/28;C30B25/06;H01B13/00;H01L39/24;(IPC1-7):C23C14/28	主分类号	C01B13/14
代理机构		代理人
主权项
地址

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