| 摘要 |
PURPOSE:To decrease the number of parts and to improve strength by providing an attaching part, which is protruding to the side of the attaching surface, at the fixed end of an acceleration detecting beam. CONSTITUTION:An acceleration detecting beam 10 has a protruding attaching part 10b at a fixed end 10a. A weight 11 for increasing stress is attached to the side of a free end 10c. On the surface close to the fixed end 10a, a gage resistor utilizing the piezoelectric resistance effect of, e.g. a semiconductor, is arranged in a bridge shape, and an electrode 10e is provided. The attaching part 10b of the beam 10 is fixed to the attaching surface of a package base 1 with a bonding agent 12. Since the attaching part 10b is molded at the fixed end 10a in the protruding shape, the number of parts is decreased, the bonding parts decrease and assembling is easy. Furthermore, the reliability for strength is improved at the same time. |
