LASER BEAM SCANNER

摘要

PURPOSE:To enable fully scanning a laser beam even when the beam is highly powered and having a large diameter by cooling an oscillatory mirror combined with a parabolic mirror with water which flows through the inside of the oscillatory mirror. CONSTITUTION:An optical system of a laser beam scanner is provided with the parabolic mirror 2 as a first mirror and the oscillatory mirror 3 as a second mirror. The oscillatory mirror 3 is oscillated with a minute amplitude by a galvanometer provided at its side. The oscillatory mirror 3 consisting of a mirror plate 8 and a cooling jig on which the mirror plate is stuck. An incoming and outgoing opening for cooling water 11 is provided at the rear of the cooling jig 9 and the cooling water 12 flows through a space encircled by the cooling jig 9. The incoming and outgoing opening for cooling water 11 is connected to a cooling water coil tube. Since the cooling water flows inside of the oscillatory mirror 3 and the galvanometer works well continuously, an aiming divergency is eliminated when a butt welding is carried out.