SILICON NITRIDE MATERIAL REINFORCED WITH CVD-COATED FIBER

摘要

PURPOSE:To obtain a silicon nitride material reinforced with a CVD-coated filter having high purity, strength and corrosion resistance suitable as a jig for semiconductor production. CONSTITUTION:Reinforcing fiber sheet layers and reaction-sintered silicon nitride layers are alternately laminated in such a manner as to sandwich the fiber sheet layer between the nitride layers and the outermost silicon nitride layers are coated with silicon nitride film formed by CVD process. The porous silicon nitride layer is reinforced by the reinforcing fiber layer and the outermost silicon nitride layer is covered with the dense silicon nitride film.