| 摘要 |
PURPOSE:To obtain a stable precursor soln. for the production of lead zirconate titaninate thin film by sol-gel method, and especially to produce a lead zirconate titanate thin film having perovskite single phase even at low temp. of <500 deg.C. CONSTITUTION:Lead acetate or lead alkoxide, and zirconium alkoxide and titanium alkoxide are mixed in a lower alcohol for the reaction to which polyhydric alcohol such as ethylene glycol or its deriv. is added. The mixture liquid is concentrated to produce the precursor soln. This precursor soln. is applied on a substrate and dried and baked at >=450 deg.C max. temp. in an ozone- oxygen mixture gas flow. This process is repeated at least once more to obtain a lead zirconate titanate thin film having desired film thickness. Especially, by heat treatment at >=450 deg.C, a perovskite phase of lead zirconate titaninate is obtd. |
