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发明名称
Verfahren und Vorrichtung zur Poliertuchaufbereitung beim chemomechanischen Polieren, insbesondere von Halbleiterscheiben.
摘要
申请公布号
DE59003208(D1)
申请公布日期
1993.12.02
申请号
DE19905003208
申请日期
1990.08.09
申请人
WACKER-CHEMITRONIC GESELLSCHAFT FUER ELEKTRONIK-GRUNDSTOFFE MBH, 84489 BURGHAUSEN, DE
发明人
PRIGGE, HELENE, DR. DIPL.-CHEM., CHATSWOOD NSW 2067, AU;LANG, JOSEF, DIPL.-ING. (FH), D-8263 BURGHAUSEN, DE
分类号
B24B53/00;(IPC1-7):B24B53/00
主分类号
B24B53/00
代理机构
代理人
主权项
地址
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