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发明名称
Ion source.
摘要
申请公布号
EP0217361(B1)
申请公布日期
1993.12.01
申请号
EP19860113440
申请日期
1986.09.30
申请人
HITACHI, LTD.
发明人
OHNO, YASUNORI;KUROSAWA, TOMOE;SATO, TADASHI;KUROSAWA, YUKIO;HAKAMATA, YOSHIMI
分类号
H01J27/08;H01J27/14;H01J27/18;H01J37/08;(IPC1-7):H01J37/08
主分类号
H01J27/08
代理机构
代理人
主权项
地址
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