| 摘要 |
<p>A static pressure gas bearing assembly having a gaseous fluid discharging bearing member for supporting a shaft by the discharged gaseous fluid is disclosed. The bearing member is made of porous graphite. For the manufacture, carbon particles approximately 80 % of which have particle diameters not greater than approx. 40 microns, more particularly, particle diameters ranging from 1 - 20 microns are used. The carbon particles are subjected to molding, calcination and graphitization, whereby a porous graphite member having pores distributed substantially uniformly is obtained. In another aspect of the invention, the bearing member is made of a porous graphite material having a specific degree of swelling. Also, in another aspect, the surface of the shaft to be supported by the bearing member is coated with titanium nitride by ion plating treatment. In this manner, high-precision and high-performance bearing assembly can be provided with a reduced manufacturing cost.</p> |
