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发明名称
Verfahren zum Ausrichten von Kopiermasken bei der Halbleiterfertigung
摘要
申请公布号
DE1564290(A1)
申请公布日期
1970.02.12
申请号
DE19661564290
申请日期
1966.10.13
申请人
ERNST LEITZ GMBH
发明人
FROMUND HOCK,DIPL.-PHYS.
分类号
G03F9/00;H01L21/00
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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