| 摘要 |
An amorphous thin film as a solid lubricant having a low coefficient of friction. It is composed of silicon (Si), oxygen (O), carbon (C), and hydrogen (H), and has a composition defined by the formula: Six (Om, Cn, Hl-m-n)1-x where, x=0.03-0.02, m=0.05-0.5, =0.1-0.9, and 0.6</=m+n</=0.95. This thin film exhibits extremely low friction stably from the beginning of sliding. It has superior wear resistance owing to its high hardness.
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