发明名称 CONTACT PRINTING PROCESS
摘要 CONTACT PRINTING PROCESS Disclosed is a method for increasing the resolution in contact printing operations by ensuring an intimate contact between the mask and photoresist. A flow of air is directed at the underside of the workpiece being printed while the mask is in place to provide pressure for the necessary contact.
申请公布号 CA2021612(C) 申请公布日期 1993.11.30
申请号 CA19902021612 申请日期 1990.07.24
申请人 AMERICAN TELEPHONE AND TELEGRAPH COMPANY 发明人 DALTON, WILLIAM F.;MICKS, HENRY B., JR.
分类号 G03B27/20;G03F7/20;H05K3/00;(IPC1-7):H05K3/12 主分类号 G03B27/20
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