发明名称 |
Bonding machine with oxidization preventive means |
摘要 |
A bonding machine with an oxidation preventive assembly that is made up of two pipes installed on the bonding stage. The two pipes are formed with gas discharge holes and their terminal ends are closed by a block to prevent a back-flow of the gas supplied into the pipes. Thus, a uniform gas atmosphere is created around the workpiece which is placed on the bonding stage, preventing oxidation of the workpiece.
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申请公布号 |
US5265788(A) |
申请公布日期 |
1993.11.30 |
申请号 |
US19910797801 |
申请日期 |
1991.11.21 |
申请人 |
KABUSHIKI KAISHA SHINKAWA |
发明人 |
OZAWA, KANJI;SONODA, YUKITAKI |
分类号 |
H01L21/60;B23K3/08;H01L21/52;(IPC1-7):B23K1/00 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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