SOI semiconductor substrate,申请号US19920852064-传众专利搜索

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发明名称	SOI semiconductor substrate
摘要
申请公布号	US5266824(A)	申请公布日期	1993.11.30
申请号	US19920852064	申请日期	1992.03.16
申请人	SHIN-ETSU HANDOTAI CO., LTD.	发明人	ABE, TAKAO;NAKAZATO, YASUAKI;UCHIYAMA, ATSUO
分类号	H01L21/02;G02F1/1362;H01L21/20;H01L21/336;H01L21/762;H01L27/12;H01L29/78;H01L29/786;(IPC1-7):H01L27/01;H01L39/00	主分类号	H01L21/02
代理机构		代理人
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