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发明名称
METHODS FOR SHAPE STRAIGHTENING OF SUBSTRATE SURFACE AND FOR POLISHING THEREOF
摘要
申请公布号
JPH05315306(A)
申请公布日期
1993.11.26
申请号
JP19920145050
申请日期
1992.05.12
申请人
KAWASAKI STEEL CORP
发明人
SUHARA TAKASHI
分类号
B23Q3/08;B24B1/00;B24B7/22;H01L21/304;(IPC1-7):H01L21/304
主分类号
B23Q3/08
代理机构
代理人
主权项
地址
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