| 摘要 |
<p>PURPOSE:To facilitate the dealing of a wafer, simplify automating, and treat many wafers in a small arrangement area, regarding a data erasing equipment of an EPROM formed on the wafer. CONSTITUTION:The equipment erases data by irradiating a wafer 5 on which an EPROM is formed with a light beam, and consists of the following; a light source 7 which generates the light for erasing data and outputs it in an optical fiber 2, erasing plates 1 having irradiation surfaces 1a which diffuse the introduced light after travelling through the optical fiber 2 and radiate said light to the outside, a wafer case 6 which retains a plurality of the wafers 5 in parallel so as to keep intervals, and a means which retains a plurality of the erasing plates 1 in parallel, inserts them into the parts between the wafers 5 and picks them out from said parts. The wafers 5 are so retained by the wafer case 6 that the irradiation surfaces 1a face the wafer surfaces on which the EPROM's are formed.</p> |
