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发明名称
ION DETECTION DEVICE
摘要
申请公布号
JPH05314946(A)
申请公布日期
1993.11.26
申请号
JP19920142234
申请日期
1992.05.07
申请人
JEOL LTD
发明人
YAMADA TAKAHISA
分类号
G01N27/62;H01J43/02;H01J43/04;(IPC1-7):H01J43/02
主分类号
G01N27/62
代理机构
代理人
主权项
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