VACUUM AIRTIGHT DEVICE OF JUNCTION STRUCTURE BETWEEN CERAMIC AND METAL

摘要

PURPOSE:To hold high vacuum airtight property without generatiang cracks in a ceramics by brazing the ceramics and a metallic intermediate body in a junction pan part and by welding the metallic intermediate body and an outer peripheral metallic structure body in a welding end part. CONSTITUTION:In a device which has a junction part between a ceramic 1 and metal and requires vacuum airtightness such as an alumina/titanium junction structure vacuum airtight device used for a semiconductor device, a receiving part 6 for joining with the ceramic 1 and a metallic intermediate body 4 with a bellows 7 are provided. The ceramic 1 and the receiving part 6 are brazed through a stress relaxing material 2. The intermediate body 4 having the bellows 7 is welded to metal (outer peripheral metallic structure body 3) in an end part 8 wherein welding to the outer peripheral metallic structure body 3 provided to the bellows part 7 is possible; thereby, the ceramic 1 and the metal are jointed vacuum-airtightly. It is thereby possible to prevent application of excessive stress to the ceramic 1 due to elastic deformation of the bellows part 7.