| 摘要 |
PURPOSE:To provide a silicon carbide heating element and an industrial manufacturing method thereof wherein a positive resistance/temperature characteristic of facilitating temperature control in a region of high temperature is displayed to eliminate dust generation at the time of use. CONSTITUTION:A silicon carbide heating unit is composed of n-type silicon carbide principle sintered material of solid dissolving nitrogen, to provide composition properties with a grain boundary barrier height 0.2eV or less, residual boron amount 0.15wt.% or less, free carbon amount 2wt.% or less and relative density 90% or more. A method of manufacture comprises a process of molding by mixing a predetermined amount of amorphous boron powder and carbon black in beta-type silicon carbide powder, process of obtaining a spare sintered body of 80 to 90% relative density by sintering in a vacuum or inert gas atmosphere, process of removing a surplus component of boron and carbon by washing the spare sintered body in water and a process of performing heat treatment in the pressure nitrogen atmosphere to solid dissolve nitrogen. |
