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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH05315438(A)
申请公布日期
1993.11.26
申请号
JP19920143281
申请日期
1992.05.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
KIKUYAMA SEIICHIRO
分类号
H01L21/761;H01L21/76;H01L27/06;(IPC1-7):H01L21/76
主分类号
H01L21/761
代理机构
代理人
主权项
地址
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