FIELD EMISSION COLD CATHODE AND MANUFACTURE THEREOF

摘要

PURPOSE:To realize a field emission cold cathode which is easy to manufacture and good at reproducibility and uniformity and has high stability and reliability by forming a linear electron emission source using an emitter obtained when a thin film whose thickness is controlled with high accuracy is formed perpendicular to a substrate. CONSTITUTION:(a) Common conductors 2 are accumulated on an insulating substrate 1 and oxide films 3 are accumulated and vertically etched; (b) three layers of conductors 4 are accumulated. Of the three layers, the middle conductor is an emitter layer 5 and the remaining two are support layers 6 (the layer 5 is a thin film of thickness in an order of ten to hundred A;) (c) oxide films 7 are accumulated and subjected to flattening process; (d) the cross section 8 of the conductor thin film is exposed by polishing; (e) a mask 9 is patterned in the sectional area; (f) the oxide films are removed to obtain a vertical structure of electrodes; (g) conductors constituting oxide film 10 and control electrode 11 are accumulated in order to obtain a control electrode; (h) oxide film 12 and conductor layer 13 are removed; (i) unnecessary oxide film 14 is removed to obtain emitter 15.