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发明名称
Verfahren und Vorrichtung zum Ätzen eines zumindest Teilweise aus Metall bestehenden Ätzguts.
摘要
申请公布号
DE3885097(D1)
申请公布日期
1993.11.25
申请号
DE19883885097
申请日期
1988.08.12
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
SCHEITHAUER, ALFRED, D-7000 STUTTGART 1, DE;ALBERTH, WOLFGANG, D-7312 KIRCHHEIM/TECK, DE;POHL, GERT, D-7032 SINDELFINGEN, DE;ZIEGLER, HERBERT, D-7030 BOEBLINGEN 4, DE
分类号
C23F1/08;H01B13/00;H05K3/06;(IPC1-7):C23F1/08
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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