Membrane used in sensors - comprising membrane stretched by elastic connection in frame of single crystalline silicon@

摘要

Membrane (1) has a frame (2) of single crystalline silicon, the membrane being stretched with an elastic connection (5). Prodn. of the membrane is also claimed. The membrane is produced by applying in the upper side of a silicon wafer (7) of a 1st doping, a structure (10) of 2nd doping, and forming a layering (20) for the membrane (1) on the upper side of the wafer (7). The frame (2) is structured by etching the wafer (7) and the structure (10) of 2nd doping stretches to both sides of the inner edges of the frame (2). USE/ADVANTAGE - Used in sensors, esp. mass flow sensors or pressure sensors. Prodn. is simple.