发明名称 Semiconductor device
摘要 <p>A semiconductor device having a high packaging yield is disclosed. A light directed to a light reflection area (20) formed on a packaging substrate (10) is reflected with an accurate angle. A light directed to a second light reflection area formed on a semiconductor chip (40) is also reflected with an accurate angle. A relative inclination between the packaging substrate (10) and the semiconductor chip (40) is measured based on the reflection angles of the reflected lights. <IMAGE></p>
申请公布号 AU3867493(A) 申请公布日期 1993.11.25
申请号 AU19930038674 申请日期 1993.05.20
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 MASANORI NISHIGUCHI
分类号 H01L21/68;H01L23/544;H05K13/04;(IPC1-7):H01L23/50;H01L21/60;H01L23/12;H01L21/98 主分类号 H01L21/68
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