发明名称 |
Flip-clip-bonding alignment structure. |
摘要 |
<p>A semiconductor device having a high packaging yield is disclosed. A light directed to a light reflection area (20) formed on a packaging substrate (10) is reflected with an accurate angle. A light directed to a second light reflection area formed on a semiconductor chip (40) is also reflected with an accurate angle. A relative inclination between the packaging substrate (10) and the semiconductor chip (40) is measured based on the reflection angles of the reflected lights. <IMAGE></p> |
申请公布号 |
EP0570971(A1) |
申请公布日期 |
1993.11.24 |
申请号 |
EP19930108270 |
申请日期 |
1993.05.21 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LIMITED |
发明人 |
NISHIGUCHI, MASANORI |
分类号 |
H01L21/68;H01L23/544;H05K13/04;(IPC1-7):H01L23/544;H01L21/00 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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