发明名称 Flip-clip-bonding alignment structure.
摘要 <p>A semiconductor device having a high packaging yield is disclosed. A light directed to a light reflection area (20) formed on a packaging substrate (10) is reflected with an accurate angle. A light directed to a second light reflection area formed on a semiconductor chip (40) is also reflected with an accurate angle. A relative inclination between the packaging substrate (10) and the semiconductor chip (40) is measured based on the reflection angles of the reflected lights. <IMAGE></p>
申请公布号 EP0570971(A1) 申请公布日期 1993.11.24
申请号 EP19930108270 申请日期 1993.05.21
申请人 SUMITOMO ELECTRIC INDUSTRIES, LIMITED 发明人 NISHIGUCHI, MASANORI
分类号 H01L21/68;H01L23/544;H05K13/04;(IPC1-7):H01L23/544;H01L21/00 主分类号 H01L21/68
代理机构 代理人
主权项
地址