发明名称 |
Method and apparatus for drying wet work |
摘要 |
PCT No. PCT/JP91/00077 Sec. 371 Date Sep. 17, 1991 Sec. 102(e) Date Sep. 17, 1991 PCT Filed Jan. 24, 1991.A method and an apparatus for drying a wet work, for example, subsequent to a washing operation, in which a work is dried in an accelerated and precise manner free of stains or spots by means of: a hot D.I. water drying section 1 adapted to heat a work by immersion in hot D.I. water 11 and then to pull out the work for drying same; a vacuum drying section 2 adapted to dry off residual moisture on the work in a vacuum vessel under reduced pressure; and a work transfer means arranged to transfer the work from the hot D.I. water drying section 1 to the vacuum drying section 2.
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申请公布号 |
US5263264(A) |
申请公布日期 |
1993.11.23 |
申请号 |
US19910761883 |
申请日期 |
1991.09.17 |
申请人 |
SPEEDFAM CLEAN SYSTEM COMPANY LIMITED |
发明人 |
USUI, EIJI;SUGAI, JUNICHI |
分类号 |
F26B5/04;(IPC1-7):F26B7/00 |
主分类号 |
F26B5/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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