| 摘要 |
PURPOSE:To suppress occurrence and sticking of minute bubbles on an ultrasonic wave emitting face by a method wherein a probe is moved and put into a liquid in the direction parallel to the emitting face or perpendicular to the direction of emission in a state wherein the probe is tilted from the vertical direction prior to measurement. CONSTITUTION:A probe 1 can be rotated and shaken by a rotary mechanism 2 supporting it and an ultrasonic wave emitting face 1a thereof can be directed in the vertical direction and tilted at a prescribed angle. When the probe 1 is put into water 11 from in the air 10, it is moved at a high speed by simultaneous driving of X, Y and Z scanners 3, 4 and 5, while it is left in a state of tilting by about 35 deg., for instance, from the vertical direction. The speed of movement is higher by 1.7 times in the case when driving is made at the same speed in the three axes than in the case when the driving is made in a single axis, and the probe is moved in parallel to the ultrasonic wave emitting face 1a. Thereby the speed of a relative flow on the emitting face 1a is made high in the state of a laminar flow, minute bubbles hardly occur and they are carried away immediately by the flow even when they occur. |
