发明名称 APPARATUS AND METHOD OF X-RAY MEASUREMENT OF SINGLE CRYSTAL ORIENTATION
摘要 PURPOSE:To turn a sample around only one axis and facilitate the secure detection of a deflected X-ray with this turning only and eliminate trial and error. CONSTITUTION:A warped-type X-ray detector 18 and an X-ray half-shutter 22 are mounted on a traveling table 24 and can travel along a y-axis direction. The traveling table 24 is made to travel so as to correspond to the object crystal lattice plane of a single crystal and positioned so as to detect a deflected X-ray from the crystal lattice plane. While the X-ray half-shutter 22 is removed from the sensing region of the detector 18, a sample 14 is turned and, when the deflected X-ray is detected, the turning angle omega1 of the sample 14 at that time is measured. In that state, the half-shutter 22 is turned around the y-axis and a position where the detected intensity of the deflected X-ray is halved is found and the turning angle phi1 of the half-shutter 22 at that time is measured. The same process is performed for the other crystal lattice plane and the respective turning angles omega2 and phi2 are measured. The azimuth of the single crystal sample 14 is obtained from the angles omega1, phi1, omega2 and phi2.
申请公布号 JPH05312736(A) 申请公布日期 1993.11.22
申请号 JP19920146980 申请日期 1992.05.13
申请人 RIGAKU CORP 发明人 KIKUCHI TETSUO
分类号 G01N23/20 主分类号 G01N23/20
代理机构 代理人
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