SURFACE SHAPE MEASURING INSTRUMENT USING OPTICAL HETERODYNE INTERFERENCE,申请号JP19920145083-传众专利搜索

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发明名称	SURFACE SHAPE MEASURING INSTRUMENT USING OPTICAL HETERODYNE INTERFERENCE
摘要
申请公布号	JPH05312540(A)	申请公布日期	1993.11.22
申请号	JP19920145083	申请日期	1992.05.12
申请人	CITIZEN WATCH CO LTD	发明人	FUJITA HIROO
分类号	G01B9/02;G01B11/24;G01B11/245;(IPC1-7):G01B11/24	主分类号	G01B9/02
代理机构		代理人
主权项
地址

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