| 摘要 |
PURPOSE:To accurately picturize the actual spatial image of the surface structure or surface condition of a sample at a high speed even when the surface has a large projection, etc., by preparing third picture data by replacing the picture data obtained during the course of forward scanning with the picture data obtained during the course of backward scanning. CONSTITUTION:When the surface of a sample 10 is scanned in both the forward and backward directions shown by the arrows by making the scanning speed of a probe 21 faster so as to shorten the measuring time in a state where the distance between the probe 21 and the surface of the sample 10 is fed back, the control of the feedback becomes impossible to follow the scanning operation at the part of a projection 21 and the locus L of the probe 21 becomes the one shown by the broken line. As a result, the surface structure of the sample 10 cannot be measured at the part corresponding to the shadow of the projection 12 (the part on the right or left side of the projection 12 in the area A or A'. Therefore, when new third data are prepared corresponding to the locus L of the probe 21 by replacing the picture data of the area A obtained during the course of forward scanning with the picture data of the said area A obtained during the course of backward scanning, a picture containing a projecting and recessed section 111 and 112 is obtained. |
