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发明名称
REMOVAL OF HAZARDOUS SUBSTANCE IN FILM-FORMING APPARATUS
摘要
申请公布号
JPH05308054(A)
申请公布日期
1993.11.19
申请号
JP19920135653
申请日期
1992.04.30
申请人
NEC CORP
发明人
OSHIMA NORIKAZU
分类号
H01L21/205;H01L21/22;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
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