| 摘要 |
PURPOSE:To effectively extract the feature of a necessary pattern by applying N-digit-advance conversion processing to logarithmically converted image data, executing partial differential processing at least in one direction and extracting a boundary. CONSTITUTION:An electron microscope (SEM) image is inputted, its observed image is inputted to a frame memory and stored as an original image and then (normal) logarithmical conversion processing is applied to respective picture elements(PEs) in the original image. Then N-digit-advance conversion processing is applied to respective PEs and partial differential processing is successively executed in both X and Y directions. Then positions having a certain value and the position continuing on the addresses of the frame memory are searched by an image processor to detect the positions of a pattern. The pel addresses of the detected positions are counted up in the X and Y directions, the size value of each pel is considered for the sum of the addresses to find out the diameter or peripheral length of a hole. On the other hand, all pels in the positions are counted up and the area of the hole is found out while considering the size value of each pel. |
