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发明名称
INSPECTING METHOD USING THERMOGRAPHIC DEVICE
摘要
申请公布号
JPH05307013(A)
申请公布日期
1993.11.19
申请号
JP19920135967
申请日期
1992.04.28
申请人
JEOL LTD
发明人
HIGO KATSURO
分类号
G01J5/48;G01N25/72;G06T1/00;G06T5/00;H04N7/18;(IPC1-7):G01N25/72;G06F15/62;G06F15/68
主分类号
G01J5/48
代理机构
代理人
主权项
地址
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