PRODUCTION OF CARBON MATERIAL

摘要

PURPOSE:To efficiently obtain a carbon material with a silicon carbide coating film having an arbitrary inclined compsn. at a low cost. CONSTITUTION:Chemical vapor deposition is carried out with starting material contg. a carbon atom bonded to a hydrogen atom and a silicon atom bonded to a halogen atom in separate molecules or in one molecule and diluting gas contg. gaseous hydrogen while continuously or stepwise varying the partial pressure of hydrogen within an arbitrary range to form a silicon carbide coating film having inclined function on a carbon material.