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发明名称
CHEMICAL VAPOR GROWTH EQUIPMENT
摘要
申请公布号
JPH05308053(A)
申请公布日期
1993.11.19
申请号
JP19920086816
申请日期
1992.04.08
申请人
NEC CORP
发明人
KOIKE NOBUYUKI
分类号
G05D7/06;H01L21/205;(IPC1-7):H01L21/205
主分类号
G05D7/06
代理机构
代理人
主权项
地址
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