发明名称 (A) ;MANUFACTURE OF THIN FILM TRANSISTOR
摘要 PURPOSE:To simplify the construction of an oxygen sensor, by arranging a solid electrolyte at the end of a planar insulating carrier plate and a reference electrode is provided between the carrier plate and the solid electrolyte while a measuring electrode on the top of the solid electrolyte to form an oxygen detector section. CONSTITUTION:A solid electrolyte 5 is provided at the end of a ceramic insulating carrier plate 1 and a reference electrode 2 between the solid electrolyte 5 and the carrier plate 1. A conductive part 3 and a reference gas passage 3' for air or the like are provided on the surface of the carrier body 1 from the reference electrode 2. A measuring electrode 7 is provided on the top of the solid electrolyte 5 and a conductive part 8 and a measuring gas path 8' between a insulation layer 6 and a protective layer 10. Then, a reference gas is passed through the path 3' to contact the reference electrode 2 while a measuring gas is passed through the path 8' to contact the measuring electrode 7 to detect oxygen with the solid electrolyte 5. Thus, the construction of an oxygen sensor can be simplified as the detector section, insulation layer and protective layer are laminated on the carrier plate.
申请公布号 JPH0582549(B2) 申请公布日期 1993.11.19
申请号 JP19840124258 申请日期 1984.06.16
申请人 NGK SPARK PLUG CO 发明人 MINOWA TAKESHI;HAYAKAWA NOBUHIRO;ADACHI YUTAKA;SHIOMI HARUHISA
分类号 G01N27/409;G01N27/407 主分类号 G01N27/409
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