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发明名称
APPARATUS FOR PRODUCING SILICON CARBIDE SINGLE CRYSTAL
摘要
申请公布号
JPH05306199(A)
申请公布日期
1993.11.19
申请号
JP19920140143
申请日期
1992.04.30
申请人
NISSHIN STEEL CO LTD
发明人
TANIGUCHI SEIICHI
分类号
C30B23/02;C30B29/36;(IPC1-7):C30B29/36
主分类号
C30B23/02
代理机构
代理人
主权项
地址
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