Equipment for manufacturing ultrapure water.

摘要

The equipment for manufacturing ultra-pure water according to the present invention is equipment in which, in a multiple effect evaporating apparatus for obtaining secondary pure water by evaporating primary pure water from a primary pure water apparatus, surface of portions, with which the water vapor generated by evaporating the primary pure water or the concentrated primary pure water and/or the secondary pure water produced by condensing the generated water vapor come into contact, respectively in the required effect, is mirror finished so as to have a mean roughness of 0.6 mu m or less. The heat transfer pipe is preferably a finned one.