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发明名称
HEAT TREATMENT SYSTEM
摘要
申请公布号
JPH05304140(A)
申请公布日期
1993.11.16
申请号
JP19920131871
申请日期
1992.04.24
申请人
TOKYO ELECTRON LTD
发明人
HATTORI HISASHI
分类号
H01L21/316;H01L21/22;(IPC1-7):H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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