| 摘要 |
The soft magnetic alloy film of the present invention is not a simple nitride alloy film but incorporates a compositional modulation in which at least the content of nitrogen is periodically modulated in the direction of film thickness after the deposition of the alloy film by a sputtering procedure. Also, the soft magnetic alloy film of the present invention contains a main content of Fe for providing higher saturation magnetization, one or more metals selected from Nb, Ta, Zr, Ti, and Hf, and fine grains of Fe based materials developed after annealing. Therefore, the soft magnetic alloy film of the present invention can exhibit better magnetic properties including higher saturation magnetization and improved soft magnetic characteristics after the annealing and also, ensuring minimum magnetostriction with a specific composition.
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