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发明名称
OPTICAL SCANNING PROBE MICROSCOPE
摘要
申请公布号
JPH05303038(A)
申请公布日期
1993.11.16
申请号
JP19920106695
申请日期
1992.04.24
申请人
NIPPON SHEET GLASS CO LTD
发明人
TANAKA ICHIRO
分类号
G02B21/00;G01Q60/22;(IPC1-7):G02B21/00
主分类号
G02B21/00
代理机构
代理人
主权项
地址
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