Via filling by single crystal aluminum,申请号US19920817871-传众专利搜索

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发明名称	Via filling by single crystal aluminum
摘要
申请公布号	US5262361(A)	申请公布日期	1993.11.16
申请号	US19920817871	申请日期	1992.01.07
申请人	TEXAS INSTRUMENTS INCORPORATED	发明人	CHO, CHIH-CHEN;GNADE, BRUCE E.
分类号	H01L21/28;C30B23/02;H01L21/285;H01L21/3205;H01L21/768;H01L23/52;H01L23/522;H01L23/532;(IPC1-7):H01L21/285;H01L21/283	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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