| 摘要 |
PURPOSE:To improve the electric characteristics of a semiconductor acceleration detector and to improve the adhesive property of a wire and a pad. CONSTITUTION:A semiconductor acceleration detector has a base 2, a stage seat 3, which is fixed to the base 2, an acceleration detecting beam 1, whose one end is supported with the stage seat 3, and a weight 4, which is mounted on the other end of the acceleration detecting beam 1. The semiconductor acceleration detector also has a pad 7 for outputting the electric signal, which is obtained by converting applied acceleration with an acceleration detecting region 8, to the outside, wires 6 and lead pins 5. Furthermore, the acceleration detecting beam 1 and the stage seat 3 are fixed with a bonding agent 9. Since the width W1 of the stage seat 3 is narrower than the width L of the acceleration detecting beam 1, the bonding area is small. Since the bonding area of the stage seat 3 and the acceleration detecting beam 1 is small, thermoremanent stress generated in the bonding agent 9 can be made small. The electric characteristics of the semiconductor acceleration detector can be improved. |
