发明名称 Scanning tunneling optical spectrometer
摘要 A scanning tunneling optical spectrometer, and corresponding method, for measuring spectral response of a tunneling probe-sample junction over the range of optical frequencies enabling determination of characteristics of and imaging of subsurface structures with nanometer resolutions. A tunneling probe is positioned adjacent the sample with a bias voltage applied and an optical source is employed to direct modulated optical radiation onto the sample probe junction to generate photoexcited tunneling current without interference from tunneling current variations caused by thermal heating by the optical radiation. The optical source is frequency scanned over a selected frequency range and the photoexcited tunneling current is detected employing phase detection thereby permitting measurement of properties of such materials as semiconductors, buried semiconductor structures, and other organic or inorganic photoconductors. Scanning tunneling optical microscopy is provided by scanning the surface of the sample thereby permitting imaging of subsurface structures.
申请公布号 US5262642(A) 申请公布日期 1993.11.16
申请号 US19920841626 申请日期 1992.02.26
申请人 NORTHWESTERN UNIVERSITY 发明人 WESSELS, BRUCE W.;QIAN, LING Q.
分类号 G01Q10/04;G01Q20/02;G01Q30/02;G01Q60/18;(IPC1-7):H01J37/26 主分类号 G01Q10/04
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